Published May 1999 | Version v1
Journal article

Effect of growth conditions on the crystal structure and composition of cubic silicon carbide layers on silicon single crystal substrates grown form solid-phase sources

  • 1. Ulyanovsk State University, ul. L. Tolstogo 42, Ulyanovsk, 432700 (Russian Federation)

Description

The structure and composition of micron-thick 3C-SiC films grown on the surface of silicon single crystals by the method of chemical transport reactions from solid-phase sources have been studied. The X-ray diffraction studies revealed that the films grown at 1360-1380 deg. C inherit the substrate structure. The Auger-electron spectroscopy provided the establishment of the dependence of the stoichiometry of epitaxial and buffer layers on the parameters of their formation

Additional details

Publishing Information

Journal Title
Crystallography Reports
Journal Volume
44
Journal Issue
3
Journal Page Range
p. 509-512
ISSN
1063-7745
CODEN
CYSTE3

Optional Information

Notes
Translated from Kristallografiya, ISSN 0023-4761, 44, 551-554 (May-June 1999); (c) 1999 MAIK/Interperiodika