Helicon Ion Source in High Plasma Density Operation Mode

We are testing a high-plasma-density Helicon Source for ion beam application. Experiments were performed with a hydrogen-, helium- and argon gas. The source has been diagnosed by a microwave interferometer. Measured plasma densities in the vicinity antenna of up to 9.0·1012 cm-3 (for argon), 2.4·1012 cm-3 (for helium), and 6.5·1011cm-3 (for hydrogen) were obtained for working gas pressure of <10 mTorr and RF power <350 W (fRF=27.12 MHz). The ion current density was ∼100 mA/cm2