Published June 1989
| Version v1
Journal article
Rate control for electron gun evaporation
- 1. Department of Applied Physics, Delft University of Technology, Delft, The Netherlands
Description
Principles for obtaining high-quality rate control for electron gun evaporation are discussed. The design criteria for rate controllers are derived from this analysis. Results are presented which have been obtained with e-guns whose evaporation rate is controlled by a Wehnelt electrode or by sweeping of the electron beam. Further improvements of rate stability can be obtained by improved design of e-guns and power supplies
Additional details
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 60
- Journal Issue
- 6
- Series
- Rev. Sci. Instrum.
- Journal Page Range
- 1177-1183
- ISSN
- 0034-6748
- CODEN
- RSINA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 20053887
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- BEAM PROFILES; ELECTRON BEAMS; ELECTRON GUNS; EPITAXY; MOLECULAR BEAMS; SPECIFICATIONS; SURFACE COATING; VACUUM EVAPORATION
- Descriptors DEC
- BEAMS; DEPOSITION; EVAPORATION; LEPTON BEAMS; PARTICLE BEAMS; PHASE TRANSFORMATIONS