The Improvement of Utilization Ratio of Metal Organic Sources for the Low Cost Preparation of MOCVD-synthesized YBCO Films based on a Self-heating Technology

We have successfully applied metal organic chemical vapor deposition (MOCVD) to synthesize biaxially textured YBa₂Cu₃O_7-δ (YBCO) superconducting films on the templates of LaMnO₃/epitaxial MgO/IBAD-MgO/solution deposition planarization (SDP) Y₂O₃/Hastelloy tape. The YBCO films have obtained dense and smooth surface with good structure and performance. A new self-heating method, which replaced the conventional heating-wire radiation heating method, has been used to heat the Hastelloy metal tapes by us. Compared with the heating-wire radiation heating method, the self-heating method shows higher energy efficiency and lower power consumption, which has good advantage to simplify the structure of the MOCVD system. Meanwhile, the utilization ratio of metal organic sources can be increased from 6% to 20% through adopting the new self-heating method. Then the preparation cost of the YBCO films can be also greatly reduced. (paper)