Published May 1991 | Version v1
Journal article

Planar silicon ion detectors with high energy resolution

Description

Analysis of factors determining resolution of silicon planar detectors with p+-n-junction obtained due to ion implantation techniques (PIPS) or small diffusion techniques (PDPS), is carried out. Resolution of PDPS-detectors constitutes 8.1 keV

Additional details

Additional titles

Original title (Russian)
Кремниевые планарные детекторы ионов с высоким энергетическим разрешением

Publishing Information

Journal Title
Pribory i Tekhnika Ehksperimenta
Journal Issue
no.3
Journal Page Range
p. 56-61.
ISSN
0032-8162
CODEN
PRTEAJ