Published 2004 | Version v1
Miscellaneous Metadata-only

Structural studies on ion implanted semiconductors using x-ray synchrotron radiation: strain evolution and growth of nanocrystals

Creators

  • 1. Institute of ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden (Germany)
  • 2. Institute of Electronic Materials Technology, Warsaw (Poland)

Description

no abstract available

Part of:
Abstracts of 5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004

Additional details

Publishing Information

Imprint Title
Abstracts of 5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004
Imprint Pagination
257 p.
Journal Page Range
p. 40

Conference

Title
5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004
Dates
14-17 Jun 2004
Place
Kazimierz Dolny (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
36060040
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
ARSENIC IONS; CRYSTAL STRUCTURE; DIAMONDS; DOSE RATES; DOSE-RESPONSE RELATIONSHIPS; FABRICATION; HETEROJUNCTIONS; INDIUM PHOSPHIDES; ION IMPLANTATION; NANOSTRUCTURES; OPTIMIZATION; PHYSICAL RADIATION EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTOR MATERIALS; SILICON CARBIDES; STRAINS; SYNCHROTRON RADIATION; TEMPERATURE DEPENDENCE; X-RAY DIFFRACTION
Descriptors DEC
BREMSSTRAHLUNG; CARBIDES; CARBON; CARBON COMPOUNDS; CHARGED PARTICLES; COHERENT SCATTERING; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELEMENTS; INDIUM COMPOUNDS; IONS; MATERIALS; MINERALS; NONMETALS; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; RADIATION EFFECTS; RADIATIONS; SCATTERING; SEMICONDUCTOR JUNCTIONS; SILICON COMPOUNDS; SPECTROSCOPY

Optional Information