Jon sputtering factor for metals

Expression for assessment of sputtering factor under atomic and molecular ion effect on metals are obtained on the basis of the supposition on coincidences of the number of chains of substituting collisions exercised by an ion and crossing the irradiated surface with a sputtering factor. The calculated results satisfactorily agree with experimental data that permits to apply the mentioned method for forecasting surface radiation damage, rate of ion polishing, layer thickness analyzed by methods using ion sputtering (auger-electron spectroscopy, mass-spectrometry of secondary ions, etc.)