Published May 1989
| Version v1
Journal article
Depth profiles of implanted 18F, 79Br, and 132Xe in silicon in the energy range 85-600 keV
Creators
- 1. Shandong Univ., Jinan (China). Dept. of Physics
- 2. Academia Sinica, Beijing (China). Inst. of Physics
Description
The RBS technique and 19F(p, αγ)16O resonance nuclear reaction at 872.1 keV, with Γ=4.2 keV, were used to measure the depth profiles of implanted 79Br, 132Xe and 19F in silicon samples. A special convolution procedure was used to extract the depth profiles from the RBS spectra and the experimental excitation yield curves. The range parameters, Rp and ΔRp obtained in this experiment were compared with theoretical calculations. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research, Section B
- Journal Volume
- 42
- Journal Issue
- 1
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 1-6
- ISSN
- 0168-583X
- CODEN
- NIMBE
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 20066857
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Numerical Data
- Descriptors DEI
- BACKSCATTERING; BROMINE IONS; BROMINE 79; CRYSTAL DOPING; EXPERIMENTAL DATA; FLUORINE IONS; FLUORINE 18; ION IMPLANTATION; KEV RANGE 10-100; KEV RANGE 100-1000; NUCLEAR REACTION ANALYSIS; PROTON REACTIONS; RADIATION SCATTERING ANALYSIS; RANGE; RESONANCE; RUTHERFORD SCATTERING; SILICON; STOPPING POWER; XENON IONS; XENON 132
- Descriptors DEC
- ATOMIC IONS; BARYON REACTIONS; BETA DECAY RADIOISOTOPES; BETA-PLUS DECAY RADIOISOTOPES; BROMINE ISOTOPES; CHARGED PARTICLES; CHEMICAL ANALYSIS; DATA; ELASTIC SCATTERING; ELEMENTS; ENERGY RANGE; EVEN-EVEN NUCLEI; EVEN-ODD NUCLEI; FLUORINE ISOTOPES; HADRON REACTIONS; HOURS LIVING RADIOISOTOPES; INFORMATION; INTERMEDIATE MASS NUCLEI; IONS; ISOMERIC TRANSITION ISOTOPES; ISOTOPES; KEV RANGE; LIGHT NUCLEI; NANOSEC LIVING RADIOISOTOPES; NONDESTRUCTIVE ANALYSIS; NUCLEAR REACTIONS; NUCLEI; NUCLEON REACTIONS; NUMERICAL DATA; ODD-EVEN NUCLEI; ODD-ODD NUCLEI; RADIOISOTOPES; SCATTERING; SECONDS LIVING RADIOISOTOPES; SEMIMETALS; STABLE ISOTOPES; XENON ISOTOPES