Published March 1995 | Version v1
Journal article

To the question of the formation of structural defects due to the stopping of fast ions in silicon

  • 1. AN SSSR, Leningrad (Russian Federation). Fiziko-Tekhnicheskij Inst.

Description

High-purity n-Si with specific resistivity (2-6.6) kOhm x cm was irradiated by 5.48 MeV α particles of 238Pu and 80 MeV fission fragments of 252Cf with low doses. Using mathematical simulation of cascade collisions with Si lattice atoms the peculiarities of Frenkel pair generation are considered in the case of light (α particles) and heavy (fission fragments) ions. Deep levels arising in the forbidden zone of Si were studied by the DLTS method. 9 refs., 2 figs., 1 tab

Additional details

Additional titles

Original title (Russian)
К вопросу об образовании дефектов структуры при торможении быстрых ионов в кремнии

Publishing Information

Journal Title
Fizika i Tekhnika Poluprovodnikov
Journal Volume
29
Journal Issue
3
Journal Page Range
p. 543-552.
ISSN
0015-3222
CODEN
FTPPA4