Published 1985 | Version v1
Book Metadata-only

Advances in electron beam testing equipment

Creators

  • 1. Lintech Instruments, Science Park, Cambridge (UK)

Description

Recent advances in electron beam testing equipment are described, with particular reference to electron guns, specimen stages, image processing, electron collectors and beam blanketing systems. The current state of the art is discussed, with indications where development will be needed to meet the test requirements of the next generations of integrated circuits. (author)

Additional details

Publishing Information

Publisher
Adam Hilger Ltd.
Imprint Place
Bristol (UK)
ISBN
0-85498-167-5
Imprint Title
Microscopy of semiconducting materials, 1985. Proceedings of the Royal Microscopical Society Conference held in St. Catherine's College, Oxford 25-27 March 1985
Imprint Pagination
543 p.
Journal Issue
no.76
Series
Institute of Physics Conference Series.
Journal Page Range
p. 501-506.

Conference

Title
Microscopy of semiconducting materials conference.
Dates
25-27 Mar 1985.
Place
Oxford (UK).

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
17041075
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; ELECTRON GUNS; IMAGE PROCESSING; INTEGRATED CIRCUITS; PERFORMANCE TESTING; SAMPLE HOLDERS
Descriptors DEC
BEAMS; ELECTRICAL PROPERTIES; ELECTRONIC CIRCUITS; LEPTON BEAMS; PARTICLE BEAMS; PHYSICAL PROPERTIES; TESTING

Optional Information

Notes
Imprint:Price Pound49.50.