Structure and recombination in InGaAs/GaAs heterostructures

The defect structure of lattice-mismatched 1-μm In/sub x/Ga/sub 1-//sub x/As (x≅0.12, misfit Δa/a≅8.5 x 10-3) epilayers on GaAs was studied with scanning cathodoluminescence (CL), transmission electron microscopy (TEM), high-voltage electron microscopy, and scanning electron microscopy. CL shows that nonradiative recombination lines exist in the GaAs buffer layer as far as 4000 A from the interface. The density of these defects is independent of substrate dislocation density. Plan-view TEM analysis indicates that the majority of these dislocations in the buffer layer are sessile edge half-loops. Cross-sectional TEM shows that loops also extend into the InGaAs epilayer, but the majority of the loops are located on the buffer layer (substrate) side of the interface. A model is proposed to explain sessile edge dislocation formation in the buffer layer. A comparison of CL and high-voltage electron microscopy images from the same interface area reveals that the dark nonradiative recombination lines seen in scanning luminescence images in this high misfit system do not correspond to the normal, isolated misfit dislocation. The nonradiative recombination line spacing is 3 μm, whereas the interface dislocation spacing is 400--1000 A. It is shown that the nonradiative recombination lines observed in CL of the interface correspond to specific groups of dislocations with different TEM contrast behavior. The dark nonradiative recombination lines also correlate with asymmetric surface ridges, suggesting that they introduce preferred nucleation sites, and that these effects are different for the two <110> directions