Published January 2001 | Version v1
Journal article Metadata-only

Plasma-assisted MOCVD growth of superconducting NbN thin films using Nb dialkylamide and Nb alkylimide precursors

Creators

  • 1. Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
  • 2. Northwestern Univ., Evanston, IL (United States). Dept. of Chemistry
  • 3. Northwestern Univ., Evanston, IL (United States). Dept. of Electrical and Computer Engineering

Description

The first example of the use of metal-organic precursors for depositing NbN superconducting thin films is described. The study, which employed niobium(IV) and niobium(V) pulsed source precursors and hydrazine plasma as the nitrogen source, indicates that Tc is highly dependent on the lattice parameters and level of oxygen impurities, which are in turn governed by growth and post-deposition annealing temperatures. (orig.)

Additional details

Publishing Information

Journal Title
Chemical Vapor Deposition
Journal Volume
7
Journal Issue
1
Series
Issued within Advanced Materials v. 13(2)
Journal Page Range
p. 25-28
ISSN
0948-1907
CODEN
CVDEFX

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
33019577
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ANNEALING; AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; CRITICAL CURRENT; CRITICAL FIELD; CRITICAL TEMPERATURE; IMPURITIES; LATTICE PARAMETERS; NIOBIUM NITRIDES; ORGANOMETALLIC COMPOUNDS; OXYGEN ADDITIONS; PRECURSOR; SCANNING ELECTRON MICROSCOPY; SUPERCONDUCTING FILMS; X-RAY DIFFRACTION
Descriptors DEC
CHEMICAL COATING; COHERENT SCATTERING; CURRENTS; DEPOSITION; DIFFRACTION; ELECTRIC CURRENTS; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; FILMS; HEAT TREATMENTS; MAGNETIC FIELDS; MICROSCOPY; NIOBIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; ORGANIC COMPOUNDS; PHYSICAL PROPERTIES; PNICTIDES; REFRACTORY METAL COMPOUNDS; SCATTERING; SPECTROSCOPY; SURFACE COATING; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; TRANSITION TEMPERATURE

Optional Information

Notes
29 refs.