Composite TiC-aC:H coatings synthesized by co-deposition from the plasma of vacuum arc source with titanium cathode and plasma of high-frequency discharge in benzene vapours

Composite TiC-aC:H coatings had been synthesized by co-deposition from the plasma of vacuum arc source with titanium cathode and plasma of high-frequency discharge in benzene vapours. Raman spectra of coatings contain TiC carbide peaks, as well as D and G peaks of diamond-like aC:H phase. SEM studies have shown that surface of the coatings is cellular or look like ''cauliflower'', the dimensions of structural elements vary from tens to hundreds nanometers. At the benzene vapor pressure 6 centre dot 10^-3 Torr and HF potential 200...500 V the coatings deposited have the best mechanical properties - hardness 32...37 GPa and Young modulus 350...400 GPa.