Published August 2006 | Version v1
Journal article Metadata-only

Infrared spectroscopy investigation of various plasma-deposited polymer films irradiated with 170 keV He+ ions

Creators

  • 1. Instituto de Fisica Gleb Wataghin, Depto. de Fisica Aplicada, Universidade Estadual de Campinas (UNICAMP), 13083-970 Campinas, SP (Brazil)
  • 2. Laboratorio de Plasmas Tecnologicos, Universidade Estadual Paulista-UNESP, Avenida Tres de Marco 511, Alto de Boa Vista, 18087-180 Sorocaba-SP (Brazil)
  • 3. Instituto de Quimica, Universidade Estadual de Campinas (UNICAMP), 13083-970 Campinas, SP (Brazil)

Description

This work illustrates the advantages of using p-polarized radiation at an incidence angle of 70o in contrast to the conventional unpolarized beam at normal (or near-normal) incidence for the infrared spectroscopic study of polycarbosilane, polysilazane and polysiloxane thin films synthesized by plasma enhanced chemical vapor deposition (PECVD) and subsequently irradiated with 170 keV He+ ions at fluences from 1 x 1014 to 1 x 1016 cm-2. Several bands not seen using the conventional mode could be observed in the polarized mode

Additional details

Identifiers

DOI
10.1016/j.nimb.2006.03.105;
PII
S0168-583X(06)00392-2;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
249
Journal Issue
1-2
Journal Page Range
p. 162-166
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
17. international conference on ion beam analysis
Dates
26 Jun - 1 Jul 2005
Place
Sevilla (Spain)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
38035469
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ABSORPTION SPECTROSCOPY; BEAMS; CHEMICAL VAPOR DEPOSITION; HELIUM IONS; INCIDENCE ANGLE; INFRARED SPECTRA; IRRADIATION; KEV RANGE 100-1000; PLASMA; POLYMERIZATION; POLYMERS; THIN FILMS
Descriptors DEC
CHARGED PARTICLES; CHEMICAL COATING; CHEMICAL REACTIONS; DEPOSITION; ENERGY RANGE; FILMS; IONS; KEV RANGE; SPECTRA; SPECTROSCOPY; SURFACE COATING

Optional Information

Copyright
Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.