Published April 28, 2006
| Version v1
Journal article
High mobility amorphous/nanocrystalline indium zinc oxide deposited at room temperature
- 1. Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon (Portugal) and CEMOP/UNINOVA, Campus da Caparica, 2829-516 Caparica (Portugal)
- 2. CEMOP/UNINOVA, Campus da Caparica, 2829-516 Caparica (Portugal)
- 3. Materials Science Department/CENIMAT, Faculty of Sciences and Technology of New University of Lisbon (Portugal)
Description
In this paper we present results of indium zinc oxide deposited at room temperature by rf magnetron sputtering, with an electron mobility as high as 60 cm2/Vs. The films present a resistivity as low as 5 x 10-4 Ω cm with an optical transmittance of 85%. The structure of these films seems to be polymorphous (mix of different amorphous and nanocrystalline phases from different origins) as detected from XRD patterns with a smooth surface and from SEM micrographs, is highly important to ensure a long lifetime when used in display devices
Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2005.07.311;
- PII
- S0040-6090(05)01118-1;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 502
- Journal Issue
- 1-2
- Journal Page Range
- p. 104-107
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 5. international conference on coatings on glass and plastics for large-area or high-volume products
- Acronym
- ICCG-5
- Dates
- 4-8 Jul 2004
- Place
- Saarbruecken (Germany)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37115144
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COATINGS; CRYSTALS; DISPLAY DEVICES; ELECTRICAL PROPERTIES; ELECTRON MOBILITY; FILMS; INDIUM OXIDES; MAGNETRONS; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TEMPERATURE RANGE 0273-0400 K; X-RAY DIFFRACTION; ZINC OXIDES
- Descriptors DEC
- CHALCOGENIDES; COHERENT SCATTERING; COMPUTER OUTPUT DEVICES; COMPUTER-GRAPHICS DEVICES; DIFFRACTION; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; INDIUM COMPOUNDS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MOBILITY; OXIDES; OXYGEN COMPOUNDS; PARTICLE MOBILITY; PHYSICAL PROPERTIES; SCATTERING; TEMPERATURE RANGE; ZINC COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.