Published 2011 | Version v1
Book

Laser induced backside dry etching of BK-7 and quartz in vacuum

Description

Laser Induced Plasma Assisted Ablation (LIPAA) has been used to carry out back side dry etching/ablation of different optical glasses under vacuum. It is observed that etching depth increases with decrease in target-substrate gap and becomes maximum (50 mu m) at zero gap size for steel-quartz pair. The maximum ablation depth for brass-quartz pair was 25 mu m. The effects of laser power on etching depth and laser scan speed has also been reported. (author)

Part of:
12 International Symposium on Advanced Materials

Additional details

Publishing Information

Publisher
Trans Tech Publications Ltd., Switzerland, Durnten-Zurich, Switzerland
Imprint Place
Islamabad (Pakistan)
Imprint Title
12 International Symposium on Advanced Materials
Imprint Pagination
623 p.
Journal Page Range
p. 261-264

Conference

Title
12. International Symposium on Advanced Materials
Dates
26-30 Sep 2011
Place
Islamabad (Pakistan)

Optional Information