Published 2011
| Version v1
Book
Laser induced backside dry etching of BK-7 and quartz in vacuum
Creators
Description
Laser Induced Plasma Assisted Ablation (LIPAA) has been used to carry out back side dry etching/ablation of different optical glasses under vacuum. It is observed that etching depth increases with decrease in target-substrate gap and becomes maximum (50 mu m) at zero gap size for steel-quartz pair. The maximum ablation depth for brass-quartz pair was 25 mu m. The effects of laser power on etching depth and laser scan speed has also been reported. (author)
Additional details
Publishing Information
- Publisher
- Trans Tech Publications Ltd., Switzerland, Durnten-Zurich, Switzerland
- Imprint Place
- Islamabad (Pakistan)
- Imprint Title
- 12 International Symposium on Advanced Materials
- Imprint Pagination
- 623 p.
- Journal Page Range
- p. 261-264
Conference
- Title
- 12. International Symposium on Advanced Materials
- Dates
- 26-30 Sep 2011
- Place
- Islamabad (Pakistan)
INIS
- Country of Publication
- Pakistan
- Country of Input or Organization
- Pakistan
- INIS RN
- 43086628
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABLATION; BRASS; ETCHING; LASER RADIATION; NEODYMIUM LASERS; PLASMA DIAGNOSTICS; PLASMA PRODUCTION; QUARTZ
- Descriptors DEC
- ALLOYS; COPPER ALLOYS; COPPER BASE ALLOYS; ELECTROMAGNETIC RADIATION; LASERS; MINERALS; OXIDE MINERALS; RADIATIONS; SOLID STATE LASERS; SURFACE FINISHING; TRANSITION ELEMENT ALLOYS; ZINC ALLOYS