Published June 2010
| Version v1
Journal article
One-dimensional continuous analytic potential solution to generic oxide–silicon–oxide system
Creators
- 1. Institute of Microelectronics, School of Electronic Engineering and Computer Science, Peking University, Beijing 100871 (China)
Description
A one-dimensional continuous analytic potential solution to a generic oxide–silicon–oxide system is developed. With the analytic solution, the potential distribution in the silicon film is predicted. A physics-based relation between surface potentials is also derived and then applied to the generic oxide–silicon–oxide metal–oxide–semiconductor field-effect transistors (MOSFETs) for the calculation of surface potentials (condensed matter: electronic structure, electrical, magnetic, and optical properties)
Availability note (English)
Available from http://dx.doi.org/10.1088/1674-1056/19/6/067304Additional details
Identifiers
Publishing Information
- Journal Title
- Chinese Physics. B
- Journal Volume
- 19
- Journal Issue
- 6
- Journal Page Range
- [4 p.]
- ISSN
- 1674-1056
INIS
- Country of Publication
- China
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 45009674
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANALYTICAL SOLUTION; ELECTRONIC STRUCTURE; MOSFET; ONE-DIMENSIONAL CALCULATIONS; OPTICAL PROPERTIES; SILICON; SURFACE POTENTIAL; THIN FILMS
- Descriptors DEC
- ELEMENTS; FIELD EFFECT TRANSISTORS; FILMS; MATHEMATICAL SOLUTIONS; MOS TRANSISTORS; PHYSICAL PROPERTIES; POTENTIALS; SEMICONDUCTOR DEVICES; SEMIMETALS; TRANSISTORS