Published October 1995 | Version v1
Journal article

Initial stages of fullerene film formation on silicon substrate

Description

Initial stages of fullerene film formation on silicon substrate of (100) orientation were studied by the methods of ellipsometry electron Auger spectroscopy, X-ray photoelectron spectroscopy, secondary-ion mass spectroscopy and scanning electron microscopy

Additional details

Additional titles

Original title (Russian)
Начальные стадии образования фуллереновой пленки на кремниевой подложке

Publishing Information

Journal Title
Fizika Tverdogo Tela
Journal Volume
37
Journal Issue
10
Journal Page Range
p. 3124-3129.
ISSN
0367-3294
CODEN
FTVTAC

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
27061695
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
CRYSTAL GROWTH; FULLERENES; VAPOR DEPOSITED COATINGS
Descriptors DEC
CARBON; COATINGS; ELEMENTS; NONMETALS