Published September 2008 | Version v1
Journal article Metadata-only

Modification of DLC films by Ni+ ions implantation

Creators

  • 1. Physics Department, Zunyi Normal College, Guizhou 563000 (China)
  • 2. Analytical and Testing Center, Beijing Normal University, Beijing 100875 (China)
  • 3. Institute of Low Energy Nuclear Physics, Beijing Normal University, Beijing 100875 (China)

Description

Enhanced diamond-like carbon (DLC) multilayer films were produced by a method of alternating the magnetic filtered vacuum cathode arc deposition and the metal vapor vacuum arc (MEVVA) implantation of Ni+ ions. The microstructure and mechanical properties of these multilayer films were studied by XPS, Raman, SEM, AFM, XRD, nano-intender and internal stress measurement. The results reveal that with the increasing dose of implanted Ni+ ions, the sp3 contents are declining and reduction of the nanohardness and release of the internal stress are observed

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2008.03.049

Additional details

Identifiers

DOI
10.1016/j.nimb.2008.03.049;
PII
S0168-583X(08)00315-7;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
266
Journal Issue
18
Journal Page Range
p. 3939-3944
ISSN
0168-583X
CODEN
NIMBEU

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
40012037
Subject category
S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ATOMIC FORCE MICROSCOPY; CATHODES; DEPOSITION; DIAMONDS; FILMS; ION IMPLANTATION; LAYERS; MAGNETIC FILTERS; MECHANICAL PROPERTIES; METALS; MODIFICATIONS; NICKEL IONS; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; VAPORS; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
Descriptors DEC
CARBON; CHARGED PARTICLES; COHERENT SCATTERING; DIFFRACTION; ELECTRODES; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; ELEMENTS; FILTERS; FLUIDS; GASES; IONS; MICROSCOPY; MINERALS; NONMETALS; PHOTOELECTRON SPECTROSCOPY; SCATTERING; SPECTROSCOPY; STRESSES

Optional Information

Copyright
Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.