Published 1995
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Synthesis of (Ti,Al)N films by ion beam assisted deposition
- 1. Osaka City Univ. (Japan)
- 2. Osaka Kyoiku Univ. (Japan)
Description
Short communication
Files
28072041.pdf
Files
(21.8 kB)
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Additional details
Publishing Information
- Publisher
- Accademic Press.
- Imprint Title
- Ninth international conference on ion beam modification of materials. Book of abstracts
- Imprint Pagination
- 452 p.
- Journal Page Range
- p. 4070.
- Report number
- INIS-AU--0004
Conference
- Title
- 9. international conference on ion beam modification of materials.
- Acronym
- IBMM'95
- Dates
- 5-10 Feb 1995.
- Place
- Canberra (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28072041
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ALUMINIUM NITRIDES; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; ION BEAMS; PHASE TRANSFORMATIONS; PHYSICAL RADIATION EFFECTS; STRUCTURAL CHEMICAL ANALYSIS; SYNTHESIS; TITANIUM NITRIDES
- Descriptors DEC
- ALUMINIUM COMPOUNDS; BEAMS; CHEMICAL COATING; DEPOSITION; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATION EFFECTS; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS