Preparation and properties of pyrolysis of vanadium oxide films

Vanadium oxide films (, , ) were obtained by the pyrolysis of vanadium acetylacetonate in controlled atmosphere. The influence of deposition parameters on the film composition is studied. It was revealed that the composition of the gas carrier is the main factor determining the film composition. Electron diffraction and electron microscopy analysis of films are carried out. Temperature dependence of resistance was studied. films deposited on glazed ceramic and sapphire change resistance by factor 103 at about 340°K. films had an activated conductivity.