Published 1974 | Version v1
Report Open

Application of the 1H(11B,α)αα reaction to the analysis of hydrogen implanted in silicon

Creators

  • 1. Centre National d'Etudes des Telecommunications (CNET), Centre de Recherches de Lannion, 22 (France)
  • 2. CEA Centre d'Etudes Nucleaires de Grenoble, 38 (France). Lab. d'Electronique et de Technologie de l'Informatique
  • 3. CEA Centre d'Etudes Nucleaires de Grenoble, 38 (France). Dept. de Recherche Fondamentale

Description

no abstract available

Availability note (English)

MF available from INIS under the Report Number.

Files

6195225.pdf

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Additional details

Additional titles

Original title (French)
Application de la reaction

Publishing Information

Imprint Pagination
9 p.
Report number
CEA-CONF--2980

Conference

Title
4. International congress AVISEM 74. Application of electronic and ionic processes.
Dates
08 Oct 1974.
Place
Toulouse, France.

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
6195225
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BORON 11 BEAMS; HYDROGEN; MEV RANGE 01-10; NUCLEAR REACTION ANALYSIS; SILICON; SPATIAL DISTRIBUTION
Descriptors DEC
BEAMS; CHEMICAL ANALYSIS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; ION BEAMS; MEV RANGE; NONMETALS; SEMIMETALS