Design considerations for rotation scanning projection moiré topography

Projection moiré topography is an optical technique for 3D surface reconstruction based on the geometric interference between two optical grids. To expand the measurement area and to maintain a high measurement resolution, a rotation scanning projection moiré profilometry technique is developed here. We present the mathematical description of an arbitrarily arranged projection moiré model, and derive the expression for phase and coordinates. On this basis, we establish a relation between the system parameters and rotation parameters, making it possible to calculate the system parameters and perform surface reconstruction for any rotation angle, using the same projection moiré model. (paper)