Published April 2014 | Version v1
Journal article

Carbon nanocluster growth inside micropipes during the SiC bulk growth process

  • 1. Institute of Solid State Physics Russian Academy of Sciences, Chernogolovka, Moscow District, 142432 (Russian Federation)
  • 2. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow District, 142432 (Russian Federation)

Description

Carbon nanocluster growth inside micropipes has been discovered during the SiC bulk growth process under near-equilibrium conditions. Measurements have been made of the morphology and structure of the carbon crystallites. An isobaric cross-section of the Si–C phase diagram and an isothermal cross-section of the triple Si–C–Ar system have been built. The C-cluster nucleation and growth conditions have been analyzed using a phase diagram. (papers)

Availability note (English)

Available from http://dx.doi.org/10.1088/2053-1591/1/2/025038

Additional details

Identifiers

Publishing Information

Journal Title
Materials Research Express (Online)
Journal Volume
1
Journal Issue
2
Journal Page Range
[6 p.]
ISSN
2053-1591

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47047873
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
CARBON; CRYSTAL GROWTH; EQUILIBRIUM; MORPHOLOGY; NUCLEATION; PHASE DIAGRAMS; SILICON CARBIDES; SOLID CLUSTERS
Descriptors DEC
CARBIDES; CARBON COMPOUNDS; DIAGRAMS; ELEMENTS; INFORMATION; NONMETALS; SILICON COMPOUNDS