Published 1990 | Version v1
Book

Carbon doping in InGaAs grown by MBE

  • 1. NTT LSI Lab., 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243001 (Japan)

Description

Carbon doping in InxGa1-xAs is investigated using solid source MBE. In As mole fractions, x, from 0 to 1 are tested. Under a constant doping level, hole concentration decreases with increasing x. When x is higher than 0.6, the conduction type is n and electron concentration increases with x. The conduction-type inversion and the behavior of carrier mobilities are explained by a self-compensation mechanism

Additional details

Publishing Information

Publisher
Materials Research Society.
Imprint Place
Pittsburgh, PA (USA)
ISBN
1-55899-051-8
Imprint Title
Impurities, defects and diffusion in semiconductors
Imprint Pagination
1050 p.
Journal Page Range
p. 887-892.

Conference

Title
Materials Research Society fall meeting.
Dates
27 Nov - 2 Dec 1989.
Place
Boston, MA (USA).

Optional Information

Secondary number(s)
CONF-891119--.