Published July 1, 2019
| Version v1
Journal article
Structure and properties of thin PZT films with inhomogeneous composition distribution
Creators
- 1. Herzen State Pedagogical University, 191186,St.-Petersburg (Russian Federation)
- 2. Saint Petersburg Electrotechnical University "LETI", 197376, St.-Petersburg (Russian Federation)
Description
The paper presents the results of studies of bilayer thin ferroelectric PZT films with a lead content variation on the films thickness, formed by the method of radio-frequency magnetron deposition at different pressures of the gas mixture. It was shown that, depending on the sequence of deposition of the layers, both the structure and the dielectric parameters of the samples change. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1742-6596/1281/1/012063Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. Conference Series (Online)
- Journal Volume
- 1281
- Journal Issue
- 1
- Journal Page Range
- [4 p.]
- ISSN
- 1742-6596
Conference
- Title
- 14. International Conference on Films and Coatings
- Dates
- 14-16 May 2019
- Place
- Saint Petersburg (Russian Federation)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 53043357
- Subject category
- S36: MATERIALS SCIENCE; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DEPOSITION; FERROELECTRIC MATERIALS; MAGNETRONS; PZT; RADIOWAVE RADIATION; THIN FILMS
- Descriptors DEC
- DIELECTRIC MATERIALS; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; LEAD COMPOUNDS; MATERIALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXYGEN COMPOUNDS; RADIATIONS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS