Temperature influence during nitrogen implantation into steel

Nitrogen ion implantations in a XC06 steel are performed at different temperatures. The nitrogen profiles are measured using the narrow 429 keV resonance of the 15N(p, αγ)12C nuclear reaction. The iron and nitrogen chemical states are determined by conversion electron Moessbauer spectroscopy (CEMS). The chemical composition of the implanted layer is also studied by means of X-ray photoelectron spectroscopy (XPS). A strong variation of the nitrogen profiles is shown at temperatures between 20 and 2000C. This temperature effect differs from that of post annealings. The formation of a superficial peak due to epsilon-carbonitride phases increasing with temperature is observed for implantations performed from 1000C. An evolution of iron nitride and carbonitride phases is observed as a function of implantation temperature. (orig.)