Integrated hybrid vibration isolator with feedforward compensation for fast high-precision positioning X/Y tables

The design, realization and control technologies of a high-performance hybrid microvibration isolator for ultra-high-precision high-speed moving X/Y tables are presented in this paper—the novel isolator with integrated passive–active high level of damping. The passive damping was implemented using air-springs in both vertical and horizontal directions, with parallel linear motors in two directions to realize the active damping and the positioning functions. It is an actual hybrid isolation system because its air-spring can also be controlled through the pneumatic loop. The isolation servo system also has fast positioning capability via the feedforward compensation for the moving tables. Compared with the conventional filtered reference type control algorithms that rely on the assumption for the adaptive filter and the controlled system, in which the disturbance is estimated from the residual signal, the feedforward compensation here shows high effectiveness of vibration isolation and high-precision positioning performance for its platform. The performance of feedforward compensation has been enhanced via an efficient state estimation adaptive algorithm, the fast Kalman filter. Finally, experimental demonstration has been shown for the prototype system and the results have verified the effectiveness of the proposed isolator system design and the adaptive control algorithm for substantially enhanced damping of the platform system with the moving X/Y tables