Published January 2005
| Version v1
Journal article
Erratum: 'Radio frequency line-plasma source using permanent magnets' [J. Vac. Sci. Technol. A 22, L7 (2004)]
Creators
- 1. Department of Energy Engineering and Science, Nagoya University, Furo-cho, chikusa-ku, Nagoya 464-8603 (Japan)
Description
no abstract available
Additional details
Identifiers
- DOI
- 10.1116/1.1834918;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 23
- Journal Issue
- 1
- Journal Page Range
- p. 218
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36080283
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- COMPUTERIZED SIMULATION; ERRORS; PERMANENT MAGNETS; PLASMA; PLASMA SIMULATION; RADIOWAVE RADIATION
- Descriptors DEC
- ELECTROMAGNETIC RADIATION; EQUIPMENT; MAGNETS; RADIATIONS; SIMULATION
Optional Information
- Notes
- (c) 2005 American Vacuum Society