Published June 16, 1986 | Version v1
Journal article

On γ-radiation and electron beam dose and gate oxide thickness dependence of radiation defects in MOS capacitors

  • 1. Politechnika Warszawska (Poland)

Description

The changes of MOS capacitor parameters caused by γ- or electron irradiation are determined by measuring 1 MHz capacitance-voltage characteristics. The flatband voltage and interface trap density of Al-SiO2-Si and (Hg)-SiO2-Si structures are calculated as functions of radiation doses and oxide thickness. The results point out that radiation effects in the oxide volume (hole generation and transport) only to a limited extent determine changes of MOS structure parameters

Additional details

Publishing Information

Journal Title
Phys. Status Solidi A
Journal Volume
95
Journal Issue
2
Series
Phys. Status Solidi A.
Journal Page Range
K203-K206
ISSN
0031-8965
CODEN
PSSAB

Optional Information

Notes
Short note.