Published December 2019 | Version v1
Journal article

Mössbauer spectroscopic microscope study on diffusion and segregation of Fe impurities in mc-Si wafer

  • 1. Shizuoka Institute of Science and Technology (Japan)
  • 2. Nagoya University Furo-cho, Graduate School of Engineering and School of Engineering (Japan)

Description

Fe diffusion and segregation process is studied in mc-Si crystals by "Mössbauer spectroscopic microscope (MSM)", which enables us to measure the Fe diffusion profiles separately for different Fe chemical states in mc-Si with a spatial resolution of several micrometres. This new method opens a possibility to investigate a diffusion process strongly influenced by the interactions and the correlations between Fe impurities and lattice defects such as dislocations, grain boundaries, and residual stresses in different grains of materials.

Additional details

Identifiers

Publishing Information

Journal Title
Hyperfine Interactions
Journal Volume
240
Journal Issue
1
Journal Page Range
p. 1-8
ISSN
0304-3843
CODEN
HYINDN

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Copyright (c) 2019 Springer Nature Switzerland AG