Published December 1990
| Version v1
Journal article
Altering surface resistivity of polycrystalline Al2O3 by Fe implantation and annealing
- 1. Wuhan Univ. of Technology, HB (China)
Description
Surface electrical properties of Fe implanted Al2O3 followed by thermal annealling are presented. The Rutherford backscattering technique, Auger electron spectra and X-ray electron spectra have been used to study the structure of the implanted layer, the implanted ion range and the ion profile. Finally, the conduction mechanism in the implanted layer is discussed briefly
Additional details
Publishing Information
- Journal Title
- Nuclear Techniques
- Journal Volume
- 13
- Journal Issue
- 12
- Series
- Nucl. Tech.
- Journal Page Range
- 718-723
- ISSN
- 0253-3219
- CODEN
- NUTED
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 22081961
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ALUMINIUM OXIDES; ANNEALING; AUGER ELECTRON SPECTROSCOPY; BACKSCATTERING; CERAMICS; DEPTH; ELECTRICAL PROPERTIES; ION IMPLANTATION; IRON IONS; PHOTOELECTRON SPECTROSCOPY; QUANTITY RATIO; RANGE; RUTHERFORD SCATTERING; SPATIAL DISTRIBUTION; X-RAY SPECTROSCOPY
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; ELASTIC SCATTERING; ELECTRON SPECTROSCOPY; HEAT TREATMENTS; IONS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; SPECTROSCOPY