Application of x-ray reflectivity measurement to monitoring of chemical reactions at 'buried' interface

A metal/yttria interface reaction by low temperature treatment at 100 0C was chased by X-ray reflectivity measurement (XRR). Since the soft reaction did not affect surface morphology, it was not detectable by atomic force microscopy. The XRR results indicated that the structural change at Au/Y2O3 interface was more significant than Pr/Y2O3. This difference can be explained by non-oxidization property of Au; the Au/Y2O3 interface easily releases O atom, resulting in instability at the interface. The soft reaction of metal/Y2O3 would be applicable to post-formation of nano-interface structures. For electronic device applications, since monitoring of microscopic reaction is mandatory, μ-XRR should be developed