Published 1984
| Version v1
Book
Secondary effects in ion bombardment-induced surface erosion
Creators
- 1. Surrey Univ., Guildford (UK). Dept. of Electronic and Electrical Engineering
- 2. Toronto Univ., Ontario (Canada). Inst. for Aerospace Studies
Description
Both the analytical and computational modelling of secondary effects as well as the experimental evidence for their existence in ion-induced surface erosion are discussed. The effects analyzed include: redeposition of sputtered atoms; effects due to the enhancement of the primary beam by scattered ions and energetic sputtered atoms originating from high-angle surfaces; effects due to beam divergence, including the interaction of the beam with defining apertures; the influence of 'latent planes' which always exist in crystalline materials; the influence of surface energy and surface tension on the development of topographical features. 94 refs.; 56 figs.; 2 tabs
Additional details
Publishing Information
- Publisher
- Elsevier.
- Imprint Place
- Amsterdam (Netherlands)
- ISBN
- 0-444-42365-6
- Imprint Title
- Ion bombardment modification of surfaces
- Imprint Pagination
- 483 p.
- Journal Volume
- 1
- Series
- Beam modification of materials.
- Journal Page Range
- p. 225-297.
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 20024378
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- EROSION; ION BEAMS; SPUTTERING; SURFACES; TOPOGRAPHY
- Descriptors DEC
- BEAMS
Optional Information
- Notes
- Imprint:Contains subject index; refs.; figs.; tabs.