Published 1989
| Version v1
Miscellaneous
Ion assisted deposition of diamond films: characterization of apparatus
Creators
- 1. Royal Melbourne Inst. of Tech. (Australia). Microelectronics and Materials Technology Centre
Description
The experimental set up for ion assisted deposition of diamond films is presented. Tests of evaporation rate control were made at two different power levels and indicated that the lower power density used allowed more control over the carbon deposition rate. It was also demonstrated that diamond formation occurs more readily for low ion energy and that diamond crystalization varies with ion mass. 4 refs., 3 figs
Additional details
Publishing Information
- Publisher
- AINSE.
- Imprint Place
- Lucas Heights (Australia)
- Imprint Title
- Sixth Australian conference on nuclear techniques of analysis: proceedings
- Imprint Pagination
- 240 p.
- Journal Page Range
- p. 21-23.
- Report number
- INIS-mf--12680
Conference
- Title
- 6. Australian conference on nuclear techniques of analysis.
- Dates
- 8-10 Nov 1989.
- Place
- Lucas Heights (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 21072600
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DIAMONDS; ENERGY DEPENDENCE; EVAPORATORS; FILMS; ION SOURCES; MASS; POWER DENSITY; SPECIFICATIONS; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- CARBON; COATINGS; ELEMENTS; MINERALS; NONMETALS