Published July 2007 | Version v1
Journal article

Multipole ion trap as cluster-ion source

  • 1. National Inst. of Advanced Industrial Science and Technology, Advanced Semiconductor Research Center, Tsukuba, Ibaraki (Japan)
  • 2. Tokyo Univ., Graduate School of Frontier Science, Kashiwa, Chiba (JP)

Description

We have developed a new type of ion trap, an external multipole static attraction ion trap (EMSIT) for use as a cluster-ion source. The EMSIT consists of 36 linear pole electrodes of nearly equal length arranged in a 6x6 square lattice and a cylindrical cage electrode surrounding the pole edges. An ion-trapping field is generated between the multipole and the cage electrode by applying ac and dc voltages to the pole electrodes. Simulation results indicated that the EMSIT can confine the ions with a wide range of mass values in the ion-trapping field and act as a mass-selective ion source using the central four poles as an ion extraction guide. In fact, we observed that Xe+ ions were confined in the EMSIT for more than 1 s in the presence of He buffer gas of 5.0x10-2 Pa. Hydrogenated Si cluster ions, SinHx+ (n=2-6), were grown from SiH4 gas and extracted with mass selection, indicating that the EMSIT acts as a cluster-ion source. (author)

Additional details

Publishing Information

Journal Title
Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications and Review Papers
Journal Volume
46
Journal Issue
7A
Journal Page Range
p. 4312-4317
ISSN
0021-4922

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
39009867
Subject category
S43: PARTICLE ACCELERATORS;
Descriptors DEI
CLUSTER BEAMS; ELECTRODES; GROWTH; ION PAIRS; ION SOURCES; IONS; MECHANICAL STRUCTURES; MOTION; OPERATION; SIMULATION; TRAPS
Descriptors DEC
BEAMS; CHARGED PARTICLES

Optional Information

Notes
17 refs., 8 figs.