Published May 1, 2008 | Version v1
Journal article

Deposition and characterization of high temperature superconducting YBa2Cu3O7-δ films obtained by DC magnetron sputtering and thermal annealing modification

  • 1. Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, 1784 Sofia (Bulgaria)
  • 2. Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences, Acad. G. Bonchev Str., Bl. 11, 1113 Sofia (Bulgaria)

Description

C-axis oriented 100-nm thick YBCO films were deposited on LaAlO3 (100) substrates at substrate temperature of 780 deg. C in a mixed oxygen/argon atmosphere (1:3) of 0.3 Torr by DC off-axis magnetron sputtering. The samples deposited were thermally annealed in oxygen ambient of 600 Torr at 530 deg. C for 40 min. Superconductivity with zero resistance 89.1K was observed for the YBCO films after annealing. These results show that thermal annealing is an important technique for improving the parameters of thin superconducting films. A correlation between the YBCO layers properties before and after annealing was established

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/113/1/012021

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
113
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1742-6596

Conference

Title
15. international summer school on vacuum, electron and ion technologies
Acronym
VEIT 2007
Dates
17-21 Sep 2007
Place
Sozopol (Bulgaria)