Published July 2005 | Version v1
Journal article Metadata-only

Nanostructured films of vanadium borides

Creators

  • 1. Donbasskaya Gosudarstvennaya Mashinostroitel'naya Akademiya, Kramatorsk (Ukraine)
  • 2. Donetskij Natsional'nyj Univ., Donetsk (Ukraine)

Description

The elemental and phase compositions of films produced by radio-frequency magnetron sputtering of a VB2 target are determined by X-ray diffraction, electron microscopy, and secondary ion mass spectrometry. The composition-depth profiles of the films are analyzed

Abstract (Russian)

Методами рентгеновской дифрактометрии, электронной микроскопии и вторичной ионной масс-спектрометрии исследованы фазовый и элементный составы пленок, полученных ВЧ-магнетронным распылением мишени VB2. Построены концентрационные профили распределения элементов по глубине

Additional details

Additional titles

Original title (Russian)
Наноструктурные пленки боридов ванадия

Publishing Information

Journal Title
Neorganicheskie Materialy
Journal Volume
41
Journal Issue
7
Journal Page Range
p. 799-802
ISSN
0002-337X
CODEN
NEOMB8

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
36094503
Subject category
S36: MATERIALS SCIENCE; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Descriptors DEI
CHEMICAL COMPOSITION; ELECTRON MICROSCOPY; FILMS; MASS SPECTRA; NANOSTRUCTURES; PHASE STUDIES; SPATIAL DISTRIBUTION; SPRAYED COATINGS; VANADIUM BORIDES; X-RAY DIFFRACTION
Descriptors DEC
BORIDES; BORON COMPOUNDS; COATINGS; COHERENT SCATTERING; DIFFRACTION; DISTRIBUTION; MICROSCOPY; SCATTERING; SPECTRA; TRANSITION ELEMENT COMPOUNDS; VANADIUM COMPOUNDS

Optional Information

Notes
8 refs., 6 figs.