Published February 2007 | Version v1
Journal article Metadata-only

Effect of rapid thermal annealing on properties of gadolinium, titanium and erbium oxide thin dielectric films at silicon carbide surface

Creators

  • 1. Inst. Fiziki Poluprovodnikov im. V.E. Lashkareva NAN Ukrainy, Kiev (Ukraine)

Description

The effect of rapid thermal annealing (RTA) on the properties of Ti, Ga, and Er oxide films on silicon carbide are studied by the methods of atomic force microscopy, monochromatic ellipsometry, optical absorption, and photoluminescence. The atomic composition of these films is analyzed as a function of the RTA duration. The phase composition of the Ti, Ga, and Er oxide films on silicon carbide is shown to depend on the RTA duration

Abstract (Russian)

Методами атомно-силовой микроскопии, монохроматической эллипсометрии, оптического поглощения и фотолюминесценции исследовано влияние быстрого термического отжига (БТО) на свойства пленок оксидов Ti, Ga, Er на карбиде кремния. Проведен также анализ атомарного состава исследуемых пленок в зависимости от времени БТО. Показано, что в зависимости от времени БТО можно изменять фазовый состав пленок оксидов Ti, Ga, Er на карбиде кремния

Additional details

Additional titles

Original title (Russian)
Влияние быстрого термического отжига на свойства тонких диэлектрических пленок оксидов гадолиния, титана и эрбия на поверхности карбида кремния

Publishing Information

Journal Title
Zhurnal Tekhnicheskoj Fiziki
Journal Volume
77
Journal Issue
2
Journal Page Range
p. 107-112
ISSN
0044-4642
CODEN
ZTEFA3

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
39064378
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ANNEALING; DIELECTRIC MATERIALS; ERBIUM OXIDES; GADOLINIUM OXIDES; MORPHOLOGY; PHOTOLUMINESCENCE; SILICON CARBIDES; SUBSTRATES; TEMPERATURE RANGE 0400-1000 K; THICKNESS; THIN FILMS; TIME DEPENDENCE; TITANIUM OXIDES; VISIBLE SPECTRA
Descriptors DEC
CARBIDES; CARBON COMPOUNDS; CHALCOGENIDES; DIMENSIONS; EMISSION; ERBIUM COMPOUNDS; FILMS; GADOLINIUM COMPOUNDS; HEAT TREATMENTS; LUMINESCENCE; MATERIALS; OXIDES; OXYGEN COMPOUNDS; PHOTON EMISSION; RARE EARTH COMPOUNDS; SILICON COMPOUNDS; SPECTRA; TEMPERATURE RANGE; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
15 refs., 5 figs., 1 tab.