Published 1990
| Version v1
Miscellaneous
Planar magnetron sputtering - construction and applications
Creators
- 1. Universidade Estadual de Campinas, SP (Brazil). Inst. de Fisica
Description
Published in summary form only
Availability note (English)
Available from the Library of Comissao Nacional de Energia Nuclear, RJ, Brazil.Additional details
Additional titles
- Original title (Portuguese)
- Planar magnetron sputtering: construcao e aplicacoes
Publishing Information
- Imprint Title
- Proceedings of the 13. National Meeting on Condensed Matter Physics
- Imprint Pagination
- 284 p.
- Journal Page Range
- p. 257.
Conference
- Title
- 13. National Meeting on Condensed Matter Physics.
- Dates
- 8-12 May 1990.
- Place
- Caxambu, MG (Brazil).
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 22039766
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract, Non-conventional Literature
- Descriptors DEI
- ALUMINIUM; CHROMIUM; COPPER; MAGNETRONS; SPUTTERING; TITANIUM
- Descriptors DEC
- ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; TRANSITION ELEMENTS
Optional Information
- Notes
- Imprint:Anais do 13. Encontro Nacional de Fisica da Materia Condensada.