Published 1990 | Version v1
Miscellaneous

Planar magnetron sputtering - construction and applications

  • 1. Universidade Estadual de Campinas, SP (Brazil). Inst. de Fisica

Description

Published in summary form only

Availability note (English)

Available from the Library of Comissao Nacional de Energia Nuclear, RJ, Brazil.

Additional details

Additional titles

Original title (Portuguese)
Planar magnetron sputtering: construcao e aplicacoes

Publishing Information

Imprint Title
Proceedings of the 13. National Meeting on Condensed Matter Physics
Imprint Pagination
284 p.
Journal Page Range
p. 257.

Conference

Title
13. National Meeting on Condensed Matter Physics.
Dates
8-12 May 1990.
Place
Caxambu, MG (Brazil).

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
22039766
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract, Non-conventional Literature
Descriptors DEI
ALUMINIUM; CHROMIUM; COPPER; MAGNETRONS; SPUTTERING; TITANIUM
Descriptors DEC
ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; TRANSITION ELEMENTS

Optional Information

Notes
Imprint:Anais do 13. Encontro Nacional de Fisica da Materia Condensada.