Energy analysis of secondary ions ejected from metals by D+ or He+ ion bombardment

A new apparatus was made for energy analysis of secondary ions sputtered from the solid combining a simple SIMS and retarding grid with energy pass filter, and the energy analysis was carried out on secondary ions from 316SS, Ni and Ti ejected by He or D ion bombardment. The energy distribution of sputtered ions was characterized by the most probable energies of several eV and high energy tails obeying the dependence of exp(-mE) where E is the secondary ion energy and m a parameter. The energy distribution was found not only to depend on species of primary ions and their energies but also to be very sensitive to surface state of the target. (author)