Published 2008
| Version v1
Miscellaneous
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Development of proprietary approaches to improvement of silicon surface adsorptivity by modification action of argon ion beams
Creators
- 1. Yaroslavskij Filial Fiziko-Tekhnologicheskogo Inst. RAN, Yaroslavl' (Russian Federation)
Description
no abstract available
Files
39120659.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Разработка оригинальных подходов по усилению адсорбционной способности поверхности кремния модифицирующим воздействием ионных пучков аргона
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XXXVIII International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 203 p.
- Journal Page Range
- p. 191
- Report number
- INIS-RU--514
Conference
- Title
- 38. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XXXVIII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 27-29 May 2008
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 39120659
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ADSORPTION; ARGON IONS; GAS ANALYSIS; ION BEAMS; ION IMPLANTATION; MONITORS; PHYSICAL RADIATION EFFECTS; SILICON
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; ELEMENTS; IONS; MEASURING INSTRUMENTS; RADIATION EFFECTS; SEMIMETALS; SORPTION
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XXXVIII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami