Published 2008 | Version v1
Miscellaneous Open

Development of proprietary approaches to improvement of silicon surface adsorptivity by modification action of argon ion beams

  • 1. Yaroslavskij Filial Fiziko-Tekhnologicheskogo Inst. RAN, Yaroslavl' (Russian Federation)

Description

no abstract available

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Part of:
Summaries of reports of XXXVIII International conference on physics of interaction of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Разработка оригинальных подходов по усилению адсорбционной способности поверхности кремния модифицирующим воздействием ионных пучков аргона

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XXXVIII International conference on physics of interaction of charged particles with crystals
Imprint Pagination
203 p.
Journal Page Range
p. 191
Report number
INIS-RU--514

Conference

Title
38. International conference on physics of interaction of charged particles with crystals
Original Conference Title
XXXVIII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
27-29 May 2008
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
39120659
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ADSORPTION; ARGON IONS; GAS ANALYSIS; ION BEAMS; ION IMPLANTATION; MONITORS; PHYSICAL RADIATION EFFECTS; SILICON
Descriptors DEC
BEAMS; CHARGED PARTICLES; ELEMENTS; IONS; MEASURING INSTRUMENTS; RADIATION EFFECTS; SEMIMETALS; SORPTION

Optional Information

Notes
1 ref. Imprint:Tezisy dokladov XXXVIII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami