Production of energetic neutral particles and low energy electrons from four anode rods ion source

The factors affecting the energetic neutral current, the low energy electron current, and the positive ion current emerging from a four-anode-rods ion source have been studied using argon gas. The neutral and electron current were measured using a simple, new technique. It was found that the energetic neutral current and the electron current depend on the positive ion current and the gas pressure. The ratio of the neutral and electron current to the positive ion current increases by increasing the gas pressure. Also it was found that at a pressure equal to 9 × 10−4 mmHg, the ratio of the neutral to the positive ion current reaches 2.34 while the ratio of the electron current to the positive ion current reaches 1.7