Advances in superconducting quantum electronic microcircuit fabrication

Standard microelectronic fabrication techniques were utilized to produce batch quantities of superconducting quantum electronic devices and circuits. The over-all goal is a fabrication technology yielding circuits that are rugged, stable, and capable of being fabricated controllably and reproducibly in sizeable quantities. Progress toward this goal is presented, with primary emphasis on the most recent work, which includes the use of electron-beam lithography and techniques of hybrid microelectronics. Several prototype microcircuits were successfully fabricated. These microcircuits are formed in a thin-film parent material consisting of layers of superconducting and normal metals, and use proximity effect structures as the active circuit elements