Theoretical studies of non-cascade sputtering processes

A theoretical model for non-cascade sputtering processes in which these processes are considered to be induced by vibrational excitation is presented. The application of this model to sputtering (both with and without charge transfer) by heavy ion bombardment of insulating targets is discussed. In addition, the authors show how this theory can be used to predict the translational energy distribution of the sputtered species and compare calculations with the experimental energy distribution of SF6 molecules sputtered from frozen SF6. The agreement between theory and experiment is reasonable. (Auth.)