Published July 2010 | Version v1
Journal article Metadata-only

Surface morphology of PMMA surfaces bombarded with GCIB

Creators

  • 1. Kyoto Univ., Dept. of Nuclear Engineering, Kyoto (Japan)
  • 2. Kyoto Univ., Quantum Science and Engineering Center, Uji, Kyoto (Japan)
  • 3. Kyoto Univ., Dept. of Electronic Science and Engineering, Kyoto (Japan)

Description

The surface morphology of polymethylmethacrylate (PMMA) samples bombarded with size-selected Ar cluster ion beam (1000-16000 atoms/cluster) was investigated. The incident cluster ion size was selected before irradiation by using the time-of-flight (TOF) method. The irradiation ion fluence was 2 x 1013 -1 x 1014 ions/cm2. The average surface roughness values measured by AFM after 25 nm etching with 20 keV Ar1000+ and Ar16000+ were 4.0±0.4 and 0.78±0.09 nm, respectively. Thus, large clusters would be suitable for low damage etching. (author)

Additional details

Publishing Information

Journal Title
Annual Report of Quantum Science and Engineering Center
Journal Volume
12
Journal Page Range
p. 39-41
ISSN
1345-0700

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
43003800
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ARGON IONS; ATOMIC FORCE MICROSCOPY; ETCHING; GASES; ION BEAMS; ION PAIRS; IRRADIATION; MORPHOLOGY; ORGANIC MATTER; PMMA; SURFACES; TIME-OF-FLIGHT METHOD
Descriptors DEC
BEAMS; CHARGED PARTICLES; ESTERS; FLUIDS; IONS; MATTER; MICROSCOPY; ORGANIC COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYMERS; POLYVINYLS; SURFACE FINISHING

Optional Information

Notes
19 refs., 2 figs.