Published 2023 | Version v1
Journal article Metadata-only

Plasma treatment of titanium dioxide film for black TiO2

Creators

  • 1. Institute of Physic NAS of Ukraine, Kyiv, (Ukraine)
  • 2. V. Lashkaryov Institute of Semiconductor Physics NASU, Kyiv (Ukraine)

Description

The results of the treatment of TiO2 film in volume discharge with an Ar/H2 mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment. (author)

Additional details

Publishing Information

Journal Title
Voprosy Atomnoj Nauki i Tekhniki
Journal Issue
no.4-146
Journal Page Range
p. 180-183
ISSN
1562-6016

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
55030775
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ABSORPTION SPECTRA; ANNEALING; ARGON; ELECTRIC CONDUCTIVITY; HOLLOW CATHODES; HYDROGEN; HYDROGENATION; OPACITY; PLASMA; RAMAN SPECTRA; ROUGHNESS; SAMPLE PREPARATION; SURFACE TREATMENTS; THIN FILMS; TITANIUM OXIDES
Descriptors DEC
CATHODES; CHALCOGENIDES; CHEMICAL REACTIONS; ELECTRICAL PROPERTIES; ELECTRODES; ELEMENTS; FILMS; FLUIDS; GASES; HEAT TREATMENTS; NONMETALS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RARE GASES; SPECTRA; SURFACE PROPERTIES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS