Published December 15, 1975 | Version v1
Journal article

Collimation of ion beams to micrometer dimensions

  • 1. Heidelberg Univ. (F.R. Germany). Physikalisches Inst.

Description

A collimator has been constructed to produce high-quality ion beams with diameters and angular divergences as small as 1 μm and 1 μrad, respectively. The slit scattering could be effectively suppressed by using properly shaped and manufactured collimator slits. The quality of the collimator was investigated for collimator diameters between 20 μm and 1 μm using 1 MeV H+ and H3+ beams. A design for a proton scanning microprobe making use of this collimator system and a small quadrupole doublet is discussed. (Auth.)

Additional details

Identifiers

Publishing Information

Journal Title
Nuclear Instruments and Methods
Journal Volume
130
Journal Issue
2
Series
Nucl. Instrum. Methods.
Journal Page Range
325-334
ISSN
0029-554X

Optional Information

Notes
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