Published 1970
| Version v1
Book
Ion implantation in semiconductors: silicon and germanium
Creators
Description
no abstract available
Additional details
Publishing Information
- Publisher
- Academic Press Inc.
- Imprint Place
- New York
- Imprint Pagination
- 290 p.
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 2005834
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Progress Report
- Descriptors DEI
- BIBLIOGRAPHY; CRYSTALS; ELECTRIC CONDUCTIVITY; GERMANIUM; HALL EFFECT; IMPURITIES; ION BEAMS; LATTICES; RADIATION EFFECTS; SILICON; BOMBARDMENT; ION IMPLANTATION