Absolute population of metastable states of argon in high-frequency discharge plasma

The absolute populations of the argon metastable states in the high-frequency discharge in the atmosphere of the pure argon and argon mixture with the silane (Ar 95%-SiH4 5%) are determined. Three lines are identified in the course of the experiments, corresponding to the irradiation processes transitions (3p55p → 3p54s), whereby the metastable states decay takes place, are identified. The population of 3p55p configuration levels is determined by the spectral lines intensity. The range of the population, which in the pure argon constitutes 19.93 x 105-184.42 x 105 cm-3, equals 13.55 x 105-65.72 x 105 cm-3 in the argon mixture with the silane. The population of the 3P2 and 3P0 metastable levels in the pure argon and argon mixture with the silane are identified. The population dependence of the argon metastable states on the pressure is studied